Area-Selective Etching of Poly(methyl methacrylate) Films by

Area-Selective Etching of Poly(methyl methacrylate) Films by Catalytic Decomposition

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Fluorine-containing polymeric inhibitor for highly selective and durable area-selective atomic layer deposition - ScienceDirect

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Area-Selective Etching of Poly(methyl methacrylate) Films by Catalytic Decomposition

PDF) Area-Selective Deposition of Ruthenium by Combining Atomic Layer Deposition and Selective Etching

Area-Selective Etching of Poly(methyl methacrylate) Films by Catalytic Decomposition

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Area-Selective Etching of Poly(methyl methacrylate) Films by Catalytic Decomposition